TY  - RPRT
TI  - Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator
AU  - Vanackere, Tom [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); Ghent Univ. (Belgium)] (ORCID:0000000346929467)
AU  - Hermans, Artur [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); Ghent Univ. (Belgium)] (ORCID:0000000329117125)
AU  - Christen, Ian [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)] (ORCID:0000000158416488)
AU  - Panuski, Christopher [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)] (ORCID:0000000179698226)
AU  - Dong, Mark [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); MITRE Corporation, Bedford, MA (United States)] (ORCID:000000028577451X)
AU  - Zimmermann, Matthew [MITRE Corporation, Bedford, MA (United States)] (ORCID:0009000866006620)
AU  - Raniwala, Hamza [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)]
AU  - Leenheer, Andrew J. [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)] (ORCID:000000034735292X)
AU  - Eichenfield, Matt [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Univ. of Arizona, Tucson, AZ (United States); Univ. of Colorado, Boulder, CO (United States)]
AU  - Gilbert, Gerald [MITRE Corporation, Princeton, NJ (United States)] (ORCID:0000000288155423)
AU  - Englund, Dirk [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)] (ORCID:0000000210433489)
PY  - 2025
DO  - 10.1038/s41467-025-66718-4
UR  - https://www.osti.gov/biblio/3376349
ID  - 3376349
ER  -