@misc{indiciae1652a370c3fc,
  title = {Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator},
  author = {Vanackere, Tom [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); Ghent Univ. (Belgium)] (ORCID:0000000346929467) and Hermans, Artur [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); Ghent Univ. (Belgium)] (ORCID:0000000329117125) and Christen, Ian [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)] (ORCID:0000000158416488) and Panuski, Christopher [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)] (ORCID:0000000179698226) and Dong, Mark [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); MITRE Corporation, Bedford, MA (United States)] (ORCID:000000028577451X) and Zimmermann, Matthew [MITRE Corporation, Bedford, MA (United States)] (ORCID:0009000866006620) and Raniwala, Hamza [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)] and Leenheer, Andrew J. [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)] (ORCID:000000034735292X) and Eichenfield, Matt [Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Univ. of Arizona, Tucson, AZ (United States); Univ. of Colorado, Boulder, CO (United States)] and Gilbert, Gerald [MITRE Corporation, Princeton, NJ (United States)] (ORCID:0000000288155423) and Englund, Dirk [Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)] (ORCID:0000000210433489)},
  year = {2025},
  doi = {10.1038/s41467-025-66718-4},
  url = {https://www.osti.gov/biblio/3376349},
  note = {Source identifier: 3376349}
}