TY - RPRT TI - Creation of depth-confined, shallow nitrogen-vacancy centers in diamond with tunable density AU - Hughes Wyatt, Lillian B. [University of California, Santa Barbara, CA (United States); California Institute of Technology, Pasadena, CA (United States)] (ORCID:0000000210201661) AU - Parthasarathy, Shreyas [University of California, Santa Barbara, CA (United States)] (ORCID:000900014861631X) AU - Kantor, Isaac [University of California, Santa Barbara, CA (United States)] (ORCID:0009000908766290) AU - Kim, Casey K. [University of California, Santa Barbara, CA (United States)] (ORCID:0009000219079719) AU - Chen, Lingjie [University of California, Santa Barbara, CA (United States)] (ORCID:0009000679767862) AU - Morrison, Taylor A. [University of California, Santa Barbara, CA (United States)] (ORCID:0009000525396085) AU - Ahlers, Jeffrey [University of California, Santa Barbara, CA (United States)] (ORCID:0000000301904370) AU - Mukherjee, Kunal [Stanford University, Palo Alto, CA (United States)] (ORCID:000000022796856X) AU - Jayich, Ania C. Bleszynski [University of California, Santa Barbara, CA (United States)] (ORCID:0000000334807032) PY - 2026 DO - 10.1063/5.0316283 UR - https://www.osti.gov/biblio/3375271 ID - 3375271 ER -