TY  - RPRT
TI  - Recent progress in atomic-scale controlled plasma processing
AU  - Ishikawa, Kenji [Nagoya Univ. (Japan)] (ORCID:0000000282886620)
AU  - Nguyen, Thi-Thuy-Nga [Nagoya Univ. (Japan)] (ORCID:0000000221702488)
AU  - Inoue, Kenichi [Nagoya Univ. (Japan)] (ORCID:000000015553944X)
AU  - Osonio, Airah P [Nagoya Univ. (Japan)] (ORCID:0000000263839669)
AU  - Nguyen, Tran Trung [Nagoya Univ. (Japan)]
AU  - Tsutsumi, Takayoshi [Nagoya Univ. (Japan)] (ORCID:0000000154291606)
AU  - Li, Lan [Boise State Univ., ID (United States)] (ORCID:0000000338708437)
AU  - Shinoda, Kazunori [Hitachi High-Tech Corp., Tokyo (Japan)]
AU  - Song, Mi-Young [Korea Institute of Fusion Energy (KFE), Gunsan (Korea, Republic of). Institute of Plasma Technology]
AU  - Choi, Yong Sup [Korea Institute of Fusion Energy (KFE), Gunsan (Korea, Republic of). Institute of Plasma Technology] (ORCID:0000000218934675)
AU  - Kaganovich, Igor [Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)] (ORCID:0000000306535682)
AU  - Raitses, Yevgeny [Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)] (ORCID:0000000293829963)
PY  - 2026
DO  - 10.35848/1347-4065/ae65a4
UR  - https://www.osti.gov/biblio/3374930
ID  - 3374930
ER  -