TY  - RPRT
TI  - Enhancing mobility and interface state engineering via UV-ozone treatment in BEOL-compatible ultrathin TiO 2 transistors
AU  - Samanta, Chandan [University of Delaware, Newark, DE (United States)]
AU  - Palmese, Elia [University of Delaware, Newark, DE (United States)]
AU  - Zeng, Yuping [University of Delaware, Newark, DE (United States)]
PY  - 2026
DO  - 10.1016/j.apsusc.2026.165831
UR  - https://www.osti.gov/biblio/3022235
ID  - 3022235
ER  -