@misc{indiciae1064ac2d3f50,
  title = {Enhancing mobility and interface state engineering via UV-ozone treatment in BEOL-compatible ultrathin TiO 2 transistors},
  author = {Samanta, Chandan [University of Delaware, Newark, DE (United States)] and Palmese, Elia [University of Delaware, Newark, DE (United States)] and Zeng, Yuping [University of Delaware, Newark, DE (United States)]},
  year = {2026},
  doi = {10.1016/j.apsusc.2026.165831},
  url = {https://www.osti.gov/biblio/3022235},
  note = {Source identifier: 3022235}
}