TY - RPRT TI - Niobium hydride formation in superconducting qubit thin films AU - Leibengood, Tyler J. [Northwestern Univ., Evanston, IL (United States)] (ORCID:0000000235390438) AU - Simon, Pierre-Clément A. [Idaho National Laboratory (INL), Idaho Falls, ID (United States)] (ORCID:0000000170832628) AU - Pritchard, P. Graham [Northwestern Univ., Evanston, IL (United States)] AU - Rondinelli, James M. [Northwestern Univ., Evanston, IL (United States)] (ORCID:0000000305082175) AU - Voorhees, Peter W. [Northwestern Univ., Evanston, IL (United States)] PY - 2025 DO - 10.1103/v27k-y5fb UR - https://www.osti.gov/biblio/3012983 ID - 3012983 ER -