TY  - RPRT
TI  - Nanometer-thick ultraflat cantilever resonators
AU  - Zhou, Jian [State Univ. of New York (SUNY), Binghamton, NY (United States)] (ORCID:0000000160321007)
AU  - Moldovan, Nicolaie [Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM); Alcorix Company, Plainfield, IL (United States) ] (ORCID:0000000157154957)
AU  - Stan, Liliana [Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM)] (ORCID:0000000346267256)
AU  - Sun, Wei [State Univ. of New York (SUNY), Binghamton, NY (United States)] (ORCID:0009000984596297)
AU  - López, Daniel [Pennsylvania State Univ., University Park, PA (United States)]
AU  - Czaplewski, David A. [Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM)] (ORCID:0000000322620908)
PY  - 2025
DO  - 10.1088/1361-6439/ade44a
UR  - https://www.osti.gov/biblio/2588395
ID  - 2588395
ER  -