@misc{indiciaebaf6df7d6de6,
  title = {Nanometer-thick ultraflat cantilever resonators},
  author = {Zhou, Jian [State Univ. of New York (SUNY), Binghamton, NY (United States)] (ORCID:0000000160321007) and Moldovan, Nicolaie [Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM); Alcorix Company, Plainfield, IL (United States) ] (ORCID:0000000157154957) and Stan, Liliana [Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM)] (ORCID:0000000346267256) and Sun, Wei [State Univ. of New York (SUNY), Binghamton, NY (United States)] (ORCID:0009000984596297) and López, Daniel [Pennsylvania State Univ., University Park, PA (United States)] and Czaplewski, David A. [Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM)] (ORCID:0000000322620908)},
  year = {2025},
  doi = {10.1088/1361-6439/ade44a},
  url = {https://www.osti.gov/biblio/2588395},
  note = {Source identifier: 2588395}
}