TY  - RPRT
TI  - Thermodynamics of MgO Atomic Layer Deposition Surface Reactions
AU  - Bielinski, Ashley R. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000307735782)
AU  - Xu, Jiayi [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000317636251)
AU  - Htun, Swan Yee [Northwestern Univ., Evanston, IL (United States)]
AU  - Hruszkewycz, Stephan O. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000293949252)
AU  - Liu, Cong [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000221455034)
AU  - Martinson, Alex B. F. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000339161672)
PY  - 2025
DO  - 10.1021/acsmaterialslett.4c02078
UR  - https://www.osti.gov/biblio/2574943
ID  - 2574943
ER  -