@misc{indiciae57d60475ffa0,
  title = {Thermodynamics of MgO Atomic Layer Deposition Surface Reactions},
  author = {Bielinski, Ashley R. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000307735782) and Xu, Jiayi [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000317636251) and Htun, Swan Yee [Northwestern Univ., Evanston, IL (United States)] and Hruszkewycz, Stephan O. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000293949252) and Liu, Cong [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000221455034) and Martinson, Alex B. F. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000339161672)},
  year = {2025},
  doi = {10.1021/acsmaterialslett.4c02078},
  url = {https://www.osti.gov/biblio/2574943},
  note = {Source identifier: 2574943}
}