TY  - RPRT
TI  - A Reduced-Temperature Process for Preparing Atomically Clean Si(100) and SiGe(100) Surfaces with Vapor HF
AU  - Peña, Luis Fabián [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States); University of New South Wales, Sydney, NSW (Australia)]
AU  - Anderson, Evan M. [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000237713085)
AU  - Mudrick, John P. [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)]
AU  - Rosenberg, Samantha G. [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States); Lockheed Martin Space, Palo Alto, CA (United States)]
AU  - Scrymgeour, David A. [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000185709841)
AU  - Bussmann, Ezra [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)]
AU  - Misra, Shashank [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)]
PY  - 2025
DO  - 10.1021/acs.jpcc.5c00280
UR  - https://www.osti.gov/biblio/2566655
ID  - 2566655
ER  -