TY  - RPRT
TI  - Self-aligned fabrication of vertical, fin-based structures
AU  - Perozek, Joshua (ORCID:0000000251519131)
AU  - Palacios, Tomás (ORCID:000000022190563X)
PY  - 2024
DO  - 10.1116/6.0004047
UR  - https://www.osti.gov/biblio/2561474
ID  - 2561474
ER  -