@misc{indiciae29caddf596e8,
  title = {Self-aligned fabrication of vertical, fin-based structures},
  author = {Perozek, Joshua (ORCID:0000000251519131) and Palacios, Tomás (ORCID:000000022190563X)},
  year = {2024},
  doi = {10.1116/6.0004047},
  url = {https://www.osti.gov/biblio/2561474},
  note = {Source identifier: 2561474}
}