TY  - RPRT
TI  - Atomic layer deposited aluminum nitride for interface protection of lithium germanium thiophosphate solid electrolytes
AU  - Klueter, Sam [Univ. of Maryland, College Park, MD (United States); University of Maryland]
AU  - Wang, Yang [Univ. of Maryland, College Park, MD (United States)] (ORCID:0000000182199014)
AU  - Kallon, Elias [Univ. of Maryland, College Park, MD (United States)]
AU  - Knab, Aidan [Univ. of Maryland, College Park, MD (United States)]
AU  - Fontecha, Daniela [Univ. of Maryland, College Park, MD (United States)] (ORCID:0000000232907630)
AU  - Lee, Cholho [SK On Co., Ltd., Seoul (Korea, Republic of)] (ORCID:0000000345359140)
AU  - Rubloff, Gary W. [Univ. of Maryland, College Park, MD (United States)] (ORCID:0000000219013982)
AU  - Lee, Sang Bok [Univ. of Maryland, College Park, MD (United States)] (ORCID:0000000313757099)
AU  - Kozen, Alexander C. [Univ. of Maryland, College Park, MD (United States); Univ. of Vermont, Burlington, VT (United States)] (ORCID:0000000253112757)
PY  - 2025
DO  - 10.1116/6.0004419
UR  - https://www.osti.gov/biblio/2556841
ID  - 2556841
ER  -