TY  - RPRT
TI  - Method of making thin films of sodium fluorides and their derivatives by ALD
AU  - Mane, Anil U.
AU  - Elam, Jeffrey W.
AU  - Kang, Donghyeon
AU  - Kuraitis, Sara
AU  - Graugnard, Elton
PY  - 2024
UR  - https://www.osti.gov/biblio/2542505
ID  - 2542505
ER  -