@misc{indiciaea7577408a1b9,
  title = {Method of making thin films of sodium fluorides and their derivatives by ALD},
  author = {Mane, Anil U. and Elam, Jeffrey W. and Kang, Donghyeon and Kuraitis, Sara and Graugnard, Elton},
  year = {2024},
  url = {https://www.osti.gov/biblio/2542505},
  note = {Source identifier: 2542505}
}