@misc{indiciae952645e628f5,
  title = {Enhanced superconducting qubit performance through ammonium fluoride etch},
  author = {Kopas, Cameron J. and Goronzy, Dominic P. and Pham, Thang and Castanedo, Carlos Torres and Cheng, Matthew and Cochrane, Rory and Nast, Patrick and Lachman, Ella and Zhelev, Nikolay Z. and Vallieres, Andre and Murthy, Akshay A. and Oh, Jin-su and Zhou, Lin and Kramer, Matthew J. and Cansizoglu, Hilal and Bedzyk, Michael J. and Dravid, Vinayak P. and Romanenko, Alexander and Grassellino, Anna and Mutus, Josh Y. and Hersam, Mark C. and Yadavalli, Kameshwar},
  year = {2024},
  doi = {10.1088/2633-4356/ad88cc},
  url = {https://www.osti.gov/biblio/2466226},
  note = {Source identifier: 2466226}
}