TY  - RPRT
TI  - Large RF plasma data set for training plasma processing machine learning models
AU  - Fierro, Andrew Steven
AU  - Hardin, Thomas James
AU  - Lietz, Amanda Marie
AU  - Hopkins, Matthew M.
AU  - Belianinov, Alex Andrei
AU  - Bentz, Brian Zahler
PY  - 2023
DO  - 10.2172/2431425
UR  - https://www.osti.gov/biblio/2431425
ID  - 2431425
ER  -