@misc{indiciae300c00ea128d,
  title = {Moonstone Wafer-Scale Lithography: Initial Demonstration Results Summary},
  author = {Mudrick, John P.},
  year = {2023},
  doi = {10.2172/2430293},
  url = {https://www.osti.gov/biblio/2430293},
  note = {Source identifier: 2430293}
}