@misc{indiciae7ec6c11f3bc7, title = {A support vector machine framework for fault detection in molecular pump}, author = {Yuan, X. L. and Kai, J. and Chen, Y. and Zuo, G. Z. and Zhuang, H. D. and Li, J. H. and Hu, J. S.}, year = {2022}, doi = {10.1080/00223131.2022.2080124}, url = {https://www.osti.gov/biblio/2420545}, note = {Source identifier: 2420545} }