@misc{indiciae34094a741baf,
  title = {A transient site balance model for atomic layer etching},
  author = {Vella, Joseph R. and Hao, Qinzhen and Elgarhy, Mahmoud I. and Donnelly, Vincent M. and Graves, David B.},
  year = {2024},
  doi = {10.1088/1361-6595/ad5d12},
  url = {https://www.osti.gov/biblio/2406001},
  note = {Source identifier: 2406001}
}