TY  - RPRT
TI  - Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist
AU  - Lopez Ninantay, Jose (ORCID:0009000836429323)
AU  - Engler, Anthony
AU  - Schwartz, Jared
AU  - Kohl, Paul A. (ORCID:0000000162673647)
PY  - 2024
DO  - 10.1149/2162-8777/ad47d0
UR  - https://www.osti.gov/biblio/2350874
ID  - 2350874
ER  -