@misc{indiciae29cabcefc5a7,
  title = {Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist},
  author = {Lopez Ninantay, Jose (ORCID:0009000836429323) and Engler, Anthony and Schwartz, Jared and Kohl, Paul A. (ORCID:0000000162673647)},
  year = {2024},
  doi = {10.1149/2162-8777/ad47d0},
  url = {https://www.osti.gov/biblio/2350874},
  note = {Source identifier: 2350874}
}