@misc{indiciae60ce4ea235ed, title = {Semiconductor yields sensitive thermometry}, author = {Gupta, Chaman and Pauzauskie, Peter J.}, year = {2022}, doi = {10.1038/s41566-022-01012-z}, url = {https://www.osti.gov/biblio/2329508}, note = {Source identifier: 2329508} }