TY  - RPRT
TI  - Offset-aligned three-dimensional integrated circuit
AU  - Wilkerson, Brett P.
AU  - Bhagavat, Milind S.
AU  - Agarwal, Rahul
AU  - Yudanov, Dmitri
PY  - 2023
UR  - https://www.osti.gov/biblio/2294014
ID  - 2294014
ER  -