@misc{indiciae852807b8ace4,
  title = {Atomic layer deposition with passivation treatment},
  author = {Prinz, Friedrich B. and Xu, Shicheng and English, Timothy and Provine, John and Thian, Dickson and Torgersen, Jan},
  year = {2023},
  url = {https://www.osti.gov/biblio/2293953},
  note = {Source identifier: 2293953}
}