@misc{indiciae7a0d4e9ce2cc,
  title = {1 kV Self-Aligned Vertical GaN Superjunction Diode},
  author = {Ma, Yunwei and Porter, Matthew and Qin, Yuan and Spencer, Joseph and Du, Zhonghao and Xiao, Ming and Wang, Yifan and Kravchenko, Ivan and Briggs, Dayrl P. and Hensley, Dale K. and Udrea, Florin and Tadjer, Marko and Wang, Han and Zhang, Yuhao},
  year = {2023},
  doi = {10.1109/led.2023.3332855},
  url = {https://www.osti.gov/biblio/2278907},
  note = {Source identifier: 2278907}
}