@misc{indiciae1b1627c7b0ed,
  title = {Plasma process optimization for N-type doping applications},
  author = {Raj, Deven and Persing, Harold and Salimian, Siamak and Lacey, Kerry and Shu, Qin and Hu, Jeff Y and McTeer, Allen},
  year = {2012},
  doi = {10.1063/1.4766491},
  url = {https://www.osti.gov/biblio/22075734},
  note = {Source identifier: 22075734}
}