@misc{indiciaeb88793c55706, title = {Confocal simultaneous phase-shifting interferometry}, author = {Chenguang, Zhao and Jiubin, Tan and Jianbo, Tang and Tao, Liu and Jian, Liu}, year = {2011}, doi = {10.1364/ao.50.000655}, url = {https://www.osti.gov/biblio/22036580}, note = {Source identifier: 22036580} }