@misc{indiciae7f5f2f5d4a7d,
  title = {The IBA Easy-E-Beam Integrated Processing System},
  author = {Cleland, Marshall R and Galloway, Richard A and Lisanti, Thomas F},
  year = {2011},
  doi = {10.1063/1.3586055},
  url = {https://www.osti.gov/biblio/21513413},
  note = {Source identifier: 21513413}
}