@misc{indiciae54df141cc0d7,
  title = {Semiconductor Ion Implanters},
  author = {MacKinnon, Barry A and Ruffell, John P},
  year = {2011},
  doi = {10.1063/1.3586054},
  url = {https://www.osti.gov/biblio/21513401},
  note = {Source identifier: 21513401}
}