@misc{indiciaed0c2e3575576,
  title = {Helium Ion Microscopy for Surface Modification and Characterization.},
  author = {Belianinov, Alex},
  year = {2022},
  doi = {10.2172/2006404},
  url = {https://www.osti.gov/biblio/2006404},
  note = {Source identifier: 2006404}
}