@misc{indiciaea74c72ef0919,
  title = {Improving Ion Control for Semiconductor Processing with Repetitive Pulsed Power Phase I.},
  author = {Prager, James and Ziemba, Timothy and Lietz, Amanda},
  year = {2022},
  doi = {10.2172/2003148},
  url = {https://www.osti.gov/biblio/2003148},
  note = {Source identifier: 2003148}
}