@misc{indiciaec450992ff06d,
  title = {Area-Selective Atomic Layer Deposition Templated by Atomic Precision Fabrication.},
  author = {Frederick, Esther and Campbell, Quinn and Dwyer, Kevin and Robertson, Luke and Dryer, Michael and Schmucker, Scott and Wheeler, David and Misra, Shashank and Butera, Robert},
  year = {2022},
  doi = {10.2172/2002069},
  url = {https://www.osti.gov/biblio/2002069},
  note = {Source identifier: 2002069}
}