@misc{indiciae8a847eae8403,
  title = {Phosphorus diffusion and deactivation during SiGe oxidation},
  author = {Thornton, Chappel S. and Shen, Xiao and Tuttle, Blair and Li, Xuebin and Law, Mark E. and Pantelides, Sokrates T. and Wang, George T. and Jones, Kevin S.},
  year = {2023},
  doi = {10.1063/5.0145730},
  url = {https://www.osti.gov/biblio/1968108},
  note = {Source identifier: 1968108}
}