TY  - RPRT
TI  - Multifunctional light beam source for surface slope measuring long trace profilers
AU  - Yashchuk, Valeriy V.
AU  - Lacey, Ian
AU  - Anderson, Kevan
AU  - Dickert, Jeff M.
AU  - Smith, Brian V.
AU  - Takacs, Peter Z.
PY  - 2020
DO  - 10.1117/12.2570462
UR  - https://www.osti.gov/biblio/1963420
ID  - 1963420
ER  -