@misc{indiciae94bfc005b8ba,
  title = {Multifunctional light beam source for surface slope measuring long trace profilers},
  author = {Yashchuk, Valeriy V. and Lacey, Ian and Anderson, Kevan and Dickert, Jeff M. and Smith, Brian V. and Takacs, Peter Z.},
  year = {2020},
  doi = {10.1117/12.2570462},
  url = {https://www.osti.gov/biblio/1963420},
  note = {Source identifier: 1963420}
}