TY  - RPRT
TI  - Statistical Tool Size Study for Computer-Controlled Optical Surfacing
AU  - Pullen, Weslin C. (ORCID:0000000206823740)
AU  - Wang, Tianyi
AU  - Choi, Heejoo
AU  - Ke, Xiaolong
AU  - Negi, Vipender S.
AU  - Huang, Lei (ORCID:0000000256455173)
AU  - Idir, Mourad
AU  - Kim, Daewook (ORCID:0000000211228727)
PY  - 2023
DO  - 10.3390/photonics10030286
UR  - https://www.osti.gov/biblio/1960576
ID  - 1960576
ER  -