TY - RPRT TI - Beam-steering system based on a MEMS-actuated vertical-coupler array AU - Zhang, Xiaosheng AU - Wu, Ming-Chiang A. AU - Michaels, Andrew S. AU - Henriksson, Johannes PY - 2022 UR - https://www.osti.gov/biblio/1925098 ID - 1925098 ER -