@misc{indiciae32d4583d348d,
  title = {Offset-aligned three-dimensional integrated circuit},
  author = {Wilkerson, Brett P. and Bhagavat, Milind S. and Agarwal, Rahul and Yudanov, Dmitri},
  year = {2022},
  url = {https://www.osti.gov/biblio/1925075},
  note = {Source identifier: 1925075}
}