TY  - RPRT
TI  - 3D Nanoprinting Replication Enhancement Using a Simulation-Informed Analytical Model for Electron Beam Exposure Dose Compensation
AU  - Fowlkes, Jason D.
AU  - Winkler, Robert
AU  - Rack, Philip D.
AU  - Plank, Harald
PY  - 2023
DO  - 10.1021/acsomega.2c06596
UR  - https://www.osti.gov/biblio/1908882
ID  - 1908882
ER  -