TY  - RPRT
TI  - Spatial resolution in secondary-electron microscopy
AU  - Egerton, R F.
AU  - Zhu, Yimei
PY  - 2022
DO  - 10.1093/jmicro/dfac022
UR  - https://www.osti.gov/biblio/1898606
ID  - 1898606
ER  -