@misc{indiciae98960b5fb448,
  title = {Spatial resolution in secondary-electron microscopy},
  author = {Egerton, R F. and Zhu, Yimei},
  year = {2022},
  doi = {10.1093/jmicro/dfac022},
  url = {https://www.osti.gov/biblio/1898606},
  note = {Source identifier: 1898606}
}