@misc{indiciae5e3238736c9a,
  title = {Advanced Microelectronics Metrology Workshop},
  author = {Nam, Chang-Yong and Chu, Yong S. and Rao, Satyavolu Papa and Carini, Gabriella},
  year = {2022},
  doi = {10.1080/08940886.2022.2135946},
  url = {https://www.osti.gov/biblio/1898209},
  note = {Source identifier: 1898209}
}