@misc{indiciaeb9c29c37a8f2,
  title = {Microscale gas breakdown device and process},
  author = {Fu, Yangyang and Zhang, Peng and Verboncoeur, John P.},
  year = {2022},
  url = {https://www.osti.gov/biblio/1893086},
  note = {Source identifier: 1893086}
}