@misc{indiciae297bd037ca3e,
  title = {Wide bandgap semiconductor materials and devices},
  author = {Varley, Joel B. and Shen, Bo and Higashiwaki, Masataka},
  year = {2022},
  doi = {10.1063/5.0100601},
  url = {https://www.osti.gov/biblio/1883016},
  note = {Source identifier: 1883016}
}