TY - RPRT TI - Modeling the hydrodynamic impact on the tool influence function during hemispherical subaperture optical polishing AU - Ray, Nathan J. AU - Suratwala, Tayyab AU - Menapace, Joseph AU - Wong, Lana AU - Steele, William AU - Tham, Gary AU - Bauman, Brian PY - 2022 DO - 10.1364/ao.456349 UR - https://www.osti.gov/biblio/1880922 ID - 1880922 ER -