@misc{indiciaebeed2c9f75a2,
  title = {FAIR DEAL GC Thrust 3 : CMOS Integration.},
  author = {Scrymgeour, David and Leenheer, Andrew},
  year = {2021},
  url = {https://www.osti.gov/biblio/1877821},
  note = {Source identifier: 1877821}
}