@misc{indiciaef5a88b59832a,
  title = {Sandia Microsystem and Integration.},
  author = {Ruyack, Alexander and Siddiqui, Aleem and Hummel, Gwendolyn and Sorensen, Kurt W. and Forbes, Travis and Nordquist, Christopher and Eichenfield, Matt},
  year = {2021},
  url = {https://www.osti.gov/biblio/1873282},
  note = {Source identifier: 1873282}
}